PURPOSE: To prevent a film at the end of a pattern in a laminated part from peeling off by disposing a metal oxide film between an amorphous semiconductor film and a highly reflective metal film and processing the oxide film by an energy beam.
CONSTITUTION: First electrode films 2a and 2b are formed on one main surface of a transparent dielectric substrate 1. An amorphous semiconductor film 3 and a metal oxide film 4 are laminated, in that order, over the substrate so as to cover the electrode films, and an opening 9 is formed in one part of the laminate. A highly reflective metal film 5 and a second electrode film 6 are formed in that order on the substrate. Thus, a laminated body, consisting of the laminate that contains the amorphous semiconductor film 3 and the metal oxide film 4 and the laminate that contains the highly reflective metal film 5 and the second electrode film 6, is formed over the first electrodes 2a and 2b. The remaining main surface side of the substrate is exposed to an energy beam E.B. The metal oxide film 4 is formed between the highly reflective metal film 5 and the second electrode 6, whereby superior patterning can be effected without causing peeling at a contact surface between the amorphous semiconductor film and the highly reflective metal film at the end of a pattern.
IWATA HIROSHI
SANO KEIICHI
