Title:
耐久性に優れた一体型圧電/電歪膜型素子およびその製造方法
Document Type and Number:
Japanese Patent JP3999473
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an integrated piezoelectric/electrostrictive film type element exhibiting excellent durability in which the material of a substrate is not deteriorated nor the characteristics of a piezoelectric/electrostrictive layer are deteriorated even if the element is used under a high temperature high humidity atmosphere. SOLUTION: On a ceramic substrate principally comprising totally or partially stabilized zirconium oxide, a piezoelectric/electrostrictive operating part comprising a lower electrode, a piezoelectric/electrostrictive layer having a composition containing a lead element, and an upper electrode is formed integrally. Occurrence rate of different phase on the surface of the piezoelectric/electrostrictive layer is regulated in the range of 0.1-30% after a film is formed.
Inventors:
Yukihisa Takeuchi
Tsutomu Nanataki
Koji Kimura
Takahashi Masao
Tsutomu Nanataki
Koji Kimura
Takahashi Masao
Application Number:
JP2001119303A
Publication Date:
October 31, 2007
Filing Date:
April 18, 2001
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
G01L1/16; H01L41/09; H01L41/187; H01L41/22; H01L41/314; H01L41/43
Domestic Patent References:
| JP8051241A | ||||
| JP4317454A | ||||
| JP11168248A | ||||
| JP9110525A |
Attorney, Agent or Firm:
Kenji Sugimura
Kiyoshi Kuruma
Kosaku Sugimura
Kiyoshi Kuruma
Kosaku Sugimura