Title:
一体型ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP5673497
Kind Code:
B2
Inventors:
芝 守
Application Number:
JP2011244444A
Publication Date:
February 18, 2015
Filing Date:
November 08, 2011
Export Citation:
Assignee:
株式会社島津製作所
International Classes:
F04D19/04
Attorney, Agent or Firm:
Fuyuki Nagai