To provide an apparatus having a monitoring unit integrated together with various active devices through relatively simple manufacture.
The apparatus integrates an optical energy transmitting and/or receiving function with, for example, the GaAs or InP unit of the active device or, for example, the laser of a light-emitting unit. This apparatus comprises a passivation layer (34) on the active device, an silicon photodetectors (38, 40, and 42) on the layer (34). The photodetectors (38, 40 and 42) may be formed by utilizing a standard solar cell growing process, may be formed as a mesa on the active device or the light-emitting unit. Accordingly, the semiconductor which has the integrated monitoring unit and is not relatively complicated is formed.
JPS61286804 | SOLID STAGE IMAGE SENSING ELEMENT |
JP4279253 | Imaging detector mounting structure |
JPS62120773 | METHOD FOR CHECKING IMAGE SENSOR |
ANDERSON ERIC R
GEORGE J VENTURA JR
JPS62135461U | 1987-08-26 | |||
JP2002100829A | 2002-04-05 |
WO1999043056A1 | 1999-08-26 |