To provide a superior thermoelectric conversion material which is improved in total thermoelectric conversion efficiency by injecting a trace of oxygen into an inter-metal compound thermoelectric conversion material to reduce heat conductivity while keeping a thermoelectromotive force intact and maintaining conductivity to some extent, and also to provide a thermoelectric conversion element and a thermoelectric conversion module.

The oxygen-containing inter-metal compound thermoelectric conversion material has the inter-metal compound thermoelectric conversion material as its main phase and contains oxygen at a concentration represented by a mol ratio of 0.1 mol% or higher and 15 mol% or less to the main phase. The thermoelectric conversion element and the thermoelectric conversion module include the oxygen-containing inter-metal compound thermoelectric conversion material.