Title:
INTERATOMIC FORCE MICROSCOPE
Document Type and Number:
Japanese Patent JP3202303
Kind Code:
B2
Abstract:
PURPOSE: To improve a scanning interatomic force microscope (AFM) (or a submersible AFM), for which an optical lever system scanning atomic force microscope is combined with a electrochemical cell (or a liquid cell), in maintenance, controlability, a stability for AFM measurement and reliability on an AFM image.
CONSTITUTION: In an electrochemical AFM (or a submersible AFM), a cantilever support 10 and a liquid tank 17 are independently installed not to put one in contact with the other. Specifically, for all or part of the cantilever support 10, optically transparent material possible to transmit laser light is used, and a cantilever 11 is fixed at the lower end of the transparent portion. On the other hand the liquid tank 17 is so formed that the lower end of the transparent portion of the cantilever support 10 and the cantilever 11 can be submersed in liquid.
Inventors:
Amane Kitajima
Jingo Itaya
Jingo Itaya
Application Number:
JP3359792A
Publication Date:
August 27, 2001
Filing Date:
February 20, 1992
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01B21/30; G01N27/28; G01N27/416; G01N37/00; G01Q20/02; G01Q30/02; G01Q30/08; G01Q30/14; G01Q30/20; G01Q60/24; G01Q60/60; H01J37/28; (IPC1-7): G01N13/16; G01N13/10; G01N27/28; G01N27/416
Domestic Patent References:
| JP2284015A | ||||
| JP5281276A | ||||
| JP5107050A | ||||
| JP5101456A |
Other References:
Ｋ．Ｉｔａｙａ，Ｓ．Ｓｕｇａｗａｒａ，ａｎｄ Ｋ．Ｓａｓｈｉｋａｔａ、”Ｉｎ ｓｉｔｕ ｓｃａｎｎｉｎｇ ｔｕｎｎｅｌｉｎｇ ｍｉｃｒｏｓｃｏｐｙ ｏｆ ｐｌａｔｉｎｕｍ（▲ＩＩＩ▼）ｓｕｒｆａｃｅ ｗｉｔｈ ｔｈｅ ｏｂｓｅｒｖａｔｉｏｎ ｏｆ ｍｏｎａｔｏｍｉｃ ｓｔｅｐｓ”、Ｊｏｕｒｎａｌ ｏｆ Ｖａｃｕｕｍ Ｓｃｉｅｎｃｅ ＆ Ｔｅｃｈｎｏｌｏｇｙ Ａ、平成２年、第８巻、第１号、ｐ．５１５−５１９
Attorney, Agent or Firm:
Keinosuke Hayashi
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