Title:
干渉測定装置
Document Type and Number:
Japanese Patent JP4131666
Kind Code:
B2
Abstract:
An interferometric measuring device for measuring surface characteristics, shapes, distances, and changes in distance, for example vibrations, of measurement objects includes a probe section. A configuration with respect to ease of use and error-free scanning may be provided by the fact that the probe section is subdivided into a fixed probe section and a rotatable probe section mechanically and optically coupled thereto, and that a beam splitter is arranged in the rotatable probe section for creating a reference beam and a measuring beam for the interferometric measurement.
Inventors:
Pavel Dravalek
Application Number:
JP2002542819A
Publication Date:
August 13, 2008
Filing Date:
November 07, 2001
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
G01B9/02; G01B11/24
Domestic Patent References:
| JP10082609A |
Foreign References:
| DE19808273A1 | ||||
| US5640270 |
Attorney, Agent or Firm:
Toshio Yano
Einzel Felix-Reinhard
Reinhard Einsel
Einzel Felix-Reinhard
Reinhard Einsel