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Title:
INTERFERENCE MICROSCOPE
Document Type and Number:
Japanese Patent JPH0829115
Kind Code:
A
Abstract:

PURPOSE: To obtain a highly accurate interference graphic with vibration or the like applied by integrating a first part branched into a sample optical path and a reference optical path, a first return mirror and a second return mirror to return in the reference optical path and a second part mirror in rigidity.

CONSTITUTION: A first prism 3 is arranged in the direction of a parallel lighting luminous flux travels and a branch half mirror 4 and a return mirror 5 are formed as integrated single optical part so that an outgoing sample optical axis 7 and a reference optical axis 6 parallel the optical path of an incident light. A sample 8 is arranged on the optical axis 7 while a second prism 9 is arranged along the direction of incidence of two luminous fluxes passing through the optical axes 6 and 7. Like the prism 3, in the prism 9, a coincidence half mirror 10 and a return mirror 11 are integrated to make a single optical part and the prism 3 is arranged being rotated by 180° so that sample light coincides with the reference light on the half mirror 10. An interference graphic obtained on the half mirror 10 is observed at an observing position 13 through a lens 12.


Inventors:
MAKI TAKAO
Application Number:
JP18682294A
Publication Date:
February 02, 1996
Filing Date:
July 18, 1994
Export Citation:
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Assignee:
OLYMPUS OPTICAL CO
International Classes:
G01B9/04; G02B21/00; (IPC1-7): G01B9/04; G02B21/00
Attorney, Agent or Firm:
Kenji Mogami