PURPOSE: To facilitate the removal of interference spectrums in a short time by placing a sheet comprising a crystal material with no absorption in an infrared area on a thin film sample.
CONSTITUTION: A polystyrene thin film sample 8 on a silicon substrate 9 undergoes a reflection spectrum measurement with a Fourier transform infrared spectro photometer combining an infrared microscope. Reflected lights 4 and 5 respectively from the surface of the sample 8 and an interface surface between the sample 8 and the substrate 9 interfere with each other to generate an interference spectrum. A sheet made of alkali halide such as potassium bromide crystal sheet 6 is placed on the sample 8 to increase an apparent thickness of the sample. When adhesion between the sample 8 and the sheet 6 is poor, to prevent interference because of a clearance between the both, a fluid paraffin 7 is applied on the sheet 6 with a limited overlap between an infrared adsorption peak and other absorption peaks and then, the sheet 6 is put closely on the sample 8 to perform the reflection spectrum measurement. Thus, the interference spectrum is removed thereby enabling the obtaining of a reflection spectrum for the polystyrene 8 alone.
MATSUI SHIGERU
SHIZUKUISHI KENICHI