Title:
INTERFEROMETER AND ALIGNMENT THEREOF
Document Type and Number:
Japanese Patent JP3878685
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a data indicative of an adjustable amount by aligning a mirror automatically and periodically through a control means and performing spectral processing at different positions of an adjustable reflector.
SOLUTION: A mirror M6 is inclined slightly in an orthogonal direction and the spectrum of a single beam is recorded at different angles of mirror by means of a detector 20. A spectrum thus obtained is multiplied by a function (U-) and then divided by a function g(U-). The results are stored as weighted functions and then they are multiplied by a single beam and summed to produce a numeral Ioo. Subsequently, a motor 14 is stepped by ΔN and -2ΔN and the spectrum is multiplied by a weighting function to obtain numerals Ipo, Imo. The motors 14, 16 are then stepped by ΔN and the spectrum is multiplied by a weighting function to obtain a numeral Iop while the motors 16 is stepped by -2ΔN and the spectrum is multiplied by a weighting function to obtain a numeral Iom. Finally, the motor 14 is stepped by ΔN and inclination amounts Δ1, Δ2 are calculated by a control means 18 according to a formula and the motors 14, 16 are controlled to step.
Inventors:
David John Cutler
Application Number:
JP4647796A
Publication Date:
February 07, 2007
Filing Date:
March 04, 1996
Export Citation:
Assignee:
Perkin-Elmer Limited
International Classes:
G01B9/02; G01J3/45; G01J3/453; (IPC1-7): G01B9/02; G01J3/45
Domestic Patent References:
| JP7167738A | ||||
| JP5040012A |
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Toshiomi Yamazaki
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