Title:
干渉計の較正
Document Type and Number:
Japanese Patent JP6877986
Kind Code:
B2
Abstract:
In a method for calibrating an interferometer (100) having a beam path for a measuring beam (112), wherein at least one plane (320) that at least partially reflects the measuring beam (112) has been introduced into the beam path, and wherein a normal to a first plane (320) is inclined at a first angle to a measuring beam (112) incident on the first plane (320), the following steps are carried out: interferometric measurement of a first axial spacing of a first point on the first plane (320) with the measuring beam (112), and interferometric measurement of a second axial spacing of a second point on one of the at least one plane (320) with the measuring beam (112), wherein the second point is spaced apart from the first point.
Inventors:
Lucio Robledo
Pascal keserin
Pascal keserin
Application Number:
JP2016242052A
Publication Date:
May 26, 2021
Filing Date:
December 14, 2016
Export Citation:
Assignee:
The Hague-Strite AG
International Classes:
G01N21/17; G01B9/02; G01B11/00; G01B11/24
Domestic Patent References:
| JP2014190800A | ||||
| JP2006284304A | ||||
| JP2008534954A | ||||
| JP2010261934A |
Foreign References:
| US4935635 |
Attorney, Agent or Firm:
Okabe
Takao Ochi
Seiichiro Takahashi
Takao Matsui
Kosuke Uchida
Kawauchi Eiji
Hideyuki Iwatsuki
Takao Ochi
Seiichiro Takahashi
Takao Matsui
Kosuke Uchida
Kawauchi Eiji
Hideyuki Iwatsuki