Title:
干渉計システムおよびそのようなシステムを含むリソグラフィー装置
Document Type and Number:
Japanese Patent JP4216348
Kind Code:
B2
Abstract:
The system has several X and Y measuring axes cooperating with X and Y measuring mirror on object (WH). The system has one Z measuring axis (MAX7 and 8) extending partly in an XY plane and cooperating with Z measuring mirrors (R'3 and 4) on object, and Z reflectors (164 and 168). Using this simple mechanism a larger number of more accurate and reliable measurements are performed with the system.
Inventors:
Ropestra, Erik, Roelov
Striel, Alexander
Striel, Alexander
Application Number:
JP52990399A
Publication Date:
January 28, 2009
Filing Date:
November 27, 1998
Export Citation:
Assignee:
AS M Netherlands B. buoy.
International Classes:
G01B9/02; G01B11/00; G03F7/20; H01L21/027
Domestic Patent References:
| JP9068411A | ||||
| JP7301510A | ||||
| JP10074692A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki