Title:
偏光変調を用いる干渉計
Document Type and Number:
Japanese Patent JP5451267
Kind Code:
B2
Abstract:
The invention relates to an instantaneous phase shifting Fizeau interferometer using phase analysis with orthogonally polarized reference and measurement beams. The interferometer comprises a light source, adapted to generate a coherent light beam, a detector adapted to analyze the phase difference of optical light beams, location means for locating an object to be measured, a first optical path from the light source to the object and a second optical path from the object to the detector, wherein the first and the second optical path have a common section adjacent to he object, wherein an optical polarization modulator arranged in the first path switches between two orthogonal polarizations with a modulation frequency fitting the distance between the object plane and the reference plane, such that the two beams reaching the detector have at any time mutual orthogonal polarizations.
This avoids the costs and other disadvantages of so called quarter wave plates belonging to prior interferometers of this kind.
Inventors:
Martin Janssen
Application Number:
JP2009201552A
Publication Date:
March 26, 2014
Filing Date:
September 01, 2009
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B9/02; G01J9/02
Domestic Patent References:
| JP6167304A | ||||
| JP8114412A | ||||
| JP9138109A |
Foreign References:
| US20070109554 | ||||
| US20030220749 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito