Title:
干渉計及び光学機器
Document Type and Number:
Japanese Patent JP7284741
Kind Code:
B2
Abstract:
The interferometer 10 according to this disclosure includes: a first optical component 12 that splits each of the P polarization component and the S polarization component of the light to be measured into the first optical path R1 and the second optical path R2 and combines the light to be measured; a second optical component 13 placed in the first optical path; a third optical component 14 that splits the light to be measured into the P polarization component and the S polarization component; and a P polarization detector 11a and an S polarization detector 11b that respectively detect the P polarization component and the S polarization component split by the third optical component, wherein the second optical component has an optical surface that changes the propagation direction of the light to be measured and gives a phase difference between the P polarization component and the S polarization component.
Inventors:
Nobuhide Yamada
Application Number:
JP2020211727A
Publication Date:
May 31, 2023
Filing Date:
December 21, 2020
Export Citation:
Assignee:
Yokogawa Electric Corporation
Yokogawa measurement corporation
Yokogawa measurement corporation
International Classes:
G01J9/02; G01J3/45
Domestic Patent References:
| JP2010043984A | ||||
| JP9033368A | ||||
| JP59048716A | ||||
| JP2019526044A | ||||
| JP2010151572A | ||||
| JP2000146525A | ||||
| JP7190714A |
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Masahiro Ohta
Daisuke Hashimoto
Mitsutsugu Sugimura
Masahiro Ohta
Daisuke Hashimoto
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