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Title:
層間絶縁膜、保護膜形成用ポジ型感光性樹脂組成物、保護膜、層間絶縁膜、およびそれを用いた半導体装置、表示素子
Document Type and Number:
Japanese Patent JP5050450
Kind Code:
B2
Abstract:

To provide a positive photosensitive resin composition having high sensitivity, high resolution and a high residual film ratio.

The positive photosensitive resin composition comprises an alkali-soluble resin (A) and a naphthoquinonediazidosulfonic ester compound of phenol (B) having a hydroxyl group concentration of ≤0.0060 mol/g and represented by formula (1), wherein R1is a divalent organic group; R2and R3are each H, halogen, an alkyl group, a substituted alkyl group, a cycloalkyl group, a substituted cycloalkyl group, an aryl group, a substituted aryl group, a 1-5C alkoxy group or a 1-5C acyl group, R2and R3may be the same or different; a and b are each an integer of 0-3, when a plurality of symbols R2are present, they may be the same or different, and when a plurality of symbols R3are present, they may be the same or different.

COPYRIGHT: (C)2008,JPO&INPIT


Inventors:
Hiroaki Makabe
Application Number:
JP2006234703A
Publication Date:
October 17, 2012
Filing Date:
August 31, 2006
Export Citation:
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Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
G03F7/022; G02B5/20; G02F1/1333; G02F1/1337; G03F7/004; G03F7/023; H01L21/027; H01L51/50; H05B33/22
Domestic Patent References:
JP62010645A
JP2006184660A
JP2007121873A
JP2007065023A
JP7225475A
JP7209861A
JP2006162791A
JP2003043683A
JP2000187317A



 
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