Title:
オフセットマニホールドを備えた内部パージディフューザ
Document Type and Number:
Japanese Patent JP6625733
Kind Code:
B2
Abstract:
A purge tower assembly for a substrate container. The assembly may include a purge interface body, including a base portion and a top portion, for mounting to a bottom plate of a substrate container. The base portion may include a substantially tubular base sidewall and the top portion may have a top sidewall positioned on the top edge of the base portion. The top portion may include an inlet nozzle for mounting through a rearward inlet in the bottom plate. The inlet nozzle may have a substantially tubular sidewall extending upwardly from the top sidewall and defining an interior of the inlet nozzle. The base portion and the top sidewall may define an offset conduit portion disposed connected to the base portion and the inlet nozzle, the base portion and the inlet nozzle in fluid communication via the offset conduit portion.
Inventors:
Gravin, Kyle
King, Jeffrey Jay.
Fuller, matthew
King, Jeffrey Jay.
Fuller, matthew
Application Number:
JP2018511679A
Publication Date:
December 25, 2019
Filing Date:
September 02, 2016
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
H01L21/673; B65D85/30
Domestic Patent References:
| JP2007511098A | ||||
| JP2013513951A |
Foreign References:
| WO2015057739A1 | ||||
| US20150243538 | ||||
| WO2009114798A2 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda