Title:
INTERNAL REFLECTION TYPE MICROSCOPIC ELLIPSOMETER
Document Type and Number:
Japanese Patent JP2014035256
Kind Code:
A
Abstract:
To provide an internal reflection type microscopic ellipsometer which performs highly-accurate measurement on a sample prepared on cover glass with diffraction-limited horizontal resolution.
An internal reflection type microscopic ellipsometer includes an immersion objective lens 1, a non-polarizing beam splitter 5, an incident optical system 6, and an emission optical system 7. The measurement is performed while a space between the objective lens 1 and cover glass is filled with water having the approximately same refraction index as the cover glass.
Inventors:
OTSUKI SOICHI
Application Number:
JP2012176381A
Publication Date:
February 24, 2014
Filing Date:
August 08, 2012
Export Citation:
Assignee:
NAT INST OF ADV IND & TECHNOL
International Classes:
G01N21/21; G01N21/27
Attorney, Agent or Firm:
Patent Business Corporation Saegusa International Patent Office