To maintain internal power supply voltage at a constant level by compensating voltage fluctuation caused by process change in manufacturing an internal power supply circuit.

The circuit includes: a reference voltage generation part 40 which receives an external voltage and generates a reference voltage Vref; an internal voltage level amplification part 50 which amplifies the reference voltage from the generation part 40 to an internal voltage level; a process change compensation part 60 which compensates and outputs a change in the internal voltage level from the amplification part 50 in a manufacturing process; and a driver part 70 which receives the internal voltage level compensated and amplified by the compensation part 60 and drives the internal voltage.

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