Title:
被処理体の導入ポート機構及びこれを用いた処理システム
Document Type and Number:
Japanese Patent JP4120285
Kind Code:
B2
Inventors:
Yasushi Takeuchi
Application Number:
JP2002173274A
Publication Date:
July 16, 2008
Filing Date:
June 13, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B65G49/00; H01L21/677; B65G49/07; H01L21/205; H01L21/673; H01L21/68
Domestic Patent References:
| JP11274267A | ||||
| JP11307623A |
Attorney, Agent or Firm:
Akihiro Asai