Title:
【発明の名称】高速大規模並列マスクレスデジタル電子ビーム直接描画リソグラフィおよび走査型電子顕微鏡のための静電集束アドレス可能電界放出アレイチップ(AFEA’s)
Document Type and Number:
Japanese Patent JP2002541623
Kind Code:
A
Abstract:
Systems and method are described for addressable field emission array (AFEA) chips. A plurality of individually addressable cathodes are integrated with an electrostatic focusing stack and/or a plurality of detectors on the addressable field emission array. The systems and methods provide advantages including the avoidance of space-charge blow-up.
Inventors:
Thomas, Clarence Yi.
Baylor, Larry Earl.
Edgar, Voelkle
Roundes, Douglas H.
Paulus, Michael Jay.
Baylor, Larry Earl.
Edgar, Voelkle
Roundes, Douglas H.
Paulus, Michael Jay.
Application Number:
JP2000610035A
Publication Date:
December 03, 2002
Filing Date:
March 29, 2000
Export Citation:
Assignee:
Uty-Battle, L.L.C.
International Classes:
G01Q30/02; G01Q70/06; G03F7/20; H01J1/304; H01J3/02; H01J37/073; H01J37/28; H01J37/305; H01J37/317; H01L21/027; (IPC1-7): H01J1/304; G03F7/20; H01J37/073; H01J37/28; H01J37/305; H01L21/027
Attorney, Agent or Firm:
Shusaku Yamamoto