Title:
ION BEAM GENERATOR
Document Type and Number:
Japanese Patent JP2014005799
Kind Code:
A
Abstract:
To provide an ion beam generator capable of making and neutralizing plasma by using only one electron source disposed outside of a discharge chamber.
The ion beam generator capable of being operated only by one electron source is provided by using an ion acceleration system 4 for not only releasing ion current but also taking electronic current from the external, by adjusting an acceleration grid voltage, disposing ion passing holes 5a, 5b in an acceleration grid 4b and a screen grid 4a with a pattern different from a conventional one, and also changing areas of the passing holes, and the like.
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Inventors:
HAYAKAWA YUKIO
MIYAZAKI KATSUHIRO
MIYAZAKI KATSUHIRO
Application Number:
JP2012143095A
Publication Date:
January 16, 2014
Filing Date:
June 26, 2012
Export Citation:
Assignee:
JAPAN AEROSPACE EXPLORATION
International Classes:
F03H1/00; H01J27/08; H01J37/08
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Hiroshi Oura
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Hiroshi Oura
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