Title:
ION BEAM MACHINING METHOD
Document Type and Number:
Japanese Patent JP2012086273
Kind Code:
A
Abstract:
To manufacture a nanosized protrusion in a short time at low cost.
An ion beam machining method includes the steps of: dispersing nanoparticles 2 in an adhesive agent 1 and applying the agent to a work surface 3; radiating a gas cluster ion beam 4 to the work surface 3 while the nanoparticles 2 are fixed to the work surface 3; and machining the work surface 3 other than parts masked by the nanoparticles 2.
Inventors:
YAMADA SUSUMU
NAGANO MASAHIRO
NAGANO MASAHIRO
Application Number:
JP2011250459A
Publication Date:
May 10, 2012
Filing Date:
November 16, 2011
Export Citation:
Assignee:
CENTRAL RES INST ELECT
International Classes:
B23K15/00; B01J19/08; B23K15/08
Attorney, Agent or Firm:
Kazumi Murase