Title:
ION DIFFUSION SPECTROMETER USING TWO ANALYZERS IN COMBINATION
Document Type and Number:
Japanese Patent JPS5214481
Kind Code:
A
Abstract:
Improved apparatus and method for measuring ions scattered from a surface, to thereby determine the mass of atoms at the surface. The apparatus includes two analyzers, preferably an energy analyzer and mass analyzer positioned in tandem. The mass analyzer may be tuned to pass only ions having the same mass as ions in an incident ion beam, and to reject sputtered ions, some of which may have the requisite energy to pass through the energy analyzer under a given set of conditions.
Inventors:
JIEEMUZU TOMASU MATSUKINNII
ROBAATO FUREDERITSUKU GOTSUFU
ROBAATO FUREDERITSUKU GOTSUFU
Application Number:
JP7540776A
Publication Date:
February 03, 1977
Filing Date:
June 25, 1976
Export Citation:
Assignee:
MINNESOTA MINING & MFG
International Classes:
G01N23/227; G01N23/203; G01Q30/02; H01J49/00; H01J49/44; (IPC1-7): G01N23/225