Title:
イオン生成装置およびイオン注入装置
Document Type and Number:
Japanese Patent JP7194053
Kind Code:
B2
Abstract:
An ion generator includes an arc chamber defining a plasma generation space, and a cathode which emits thermoelectrons toward the plasma generation space. The arc chamber includes a box-shaped main body having an opening, and a slit member mounted to cover the opening and provided with a front slit. An inner surface of the main body is exposed to the plasma generation space made of a refractory metal material. The slit member includes an inner member made of graphite and an outer member made of another refractory metal material. The outer member includes an outer surface exposed to an outside of the arc chamber. The inner member includes an inner surface exposed to the plasma generation space, and an opening portion which forms the front slit extending from the inner surface of the inner member to the outer surface of the outer member.
Inventors:
Shuta Ochi
Application Number:
JP2019049842A
Publication Date:
December 21, 2022
Filing Date:
March 18, 2019
Export Citation:
Assignee:
Sumitomo Heavy Industries Ion Technology Co., Ltd.
International Classes:
H01J27/08; G21K5/04; H01J37/08; H01J37/317; H05H1/50
Domestic Patent References:
| JP2001167707A | ||||
| JP2016081753A |
Attorney, Agent or Firm:
Morishita Kenki
Teruo Tomisho
Teruo Tomisho
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