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Title:
ION INDUCTION DEVICE OF HIGH FREQUENCY INDUCTIVELY COUPLED PLASMA MASS SPECTROGRAPH
Document Type and Number:
Japanese Patent JPH07183002
Kind Code:
A
Abstract:

PURPOSE: To stably introduce a constant amount of analysis sample ions independent of the passage of time from high frequency inductively coupled plasma(ICP) to a magnetic field type mass spectrograph(MS) by preventing etching of a suction opening of a sampling cone caused by discharge of inductively coupled plasma.

CONSTITUTION: An ion induction device 20 combines a high frequency inductively coupled ion source with a mass spectrograph 10, and introduces ions 3 through a suction opening A which is differentially evacuated. An electrode 12 which is kept at specified voltage 13 against acceleration voltage 11 is arranged on the front side or the rear side of the suction opening A, and its tip is inserted into inductively coupled plasma 3 which is not yet sucked or was already sucked to prevent discharge producing between the inductively coupled plasma 3 and the suction opening A.


Inventors:
OTSUKA KIICHIRO
Application Number:
JP32382793A
Publication Date:
July 21, 1995
Filing Date:
December 22, 1993
Export Citation:
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Assignee:
JEOL LTD
International Classes:
G01N27/62; H01J49/10; (IPC1-7): H01J49/10
Attorney, Agent or Firm:
Hiroshi Nirazawa (7 outside)