Title:
ION NUMBER COUNTER DEVICE
Document Type and Number:
Japanese Patent JPS5258590
Kind Code:
A
Abstract:
PURPOSE: To accurately measure the number of ions in vacuum by absorbing the ions or electrons generated within ion gauge for measuring the degree of vacuum with the mesh applied with voltage.
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Inventors:
TAKEUCHI MASARU
Application Number:
JP13407875A
Publication Date:
May 14, 1977
Filing Date:
November 10, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01L21/30; G01L21/32; G01N27/60; G01N27/62; (IPC1-7): B01J17/00; G01L21/32; G01N27/62