Title:
ION PUMP CURRENT FLOW DETECTION DEVICE
Document Type and Number:
Japanese Patent JPS5226259
Kind Code:
A
Abstract:
PURPOSE: To detect and display the degree of vacuum by means of the current flow of an ion pump, and also to facilitate automatic functoning of the elements of the system in which the ion pump is operating.
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Inventors:
NAKADA TOSHIAKI
OKUMURA MASAHIDE
OKUMURA MASAHIDE
Application Number:
JP10245875A
Publication Date:
February 26, 1977
Filing Date:
August 23, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01L21/34; G01L21/30; G01R19/08; (IPC1-7): G01L21/30; G01R19/08
Domestic Patent References:
| JP46027271U |