PURPOSE: To scan a large-current ion beam two-dimensionally with a high scanning frequency over a wide range of energy.

CONSTITUTION: This device has a magnetic scanning device 230 deflecting an ion beam 31 two-dimensionally against the Z-axis 31 and a magnetic ion beam transporting device 240 re-directing the ion beam 31 from the magnetic scanning device 230 in the direction having the preset relation with the Z-axis 32 two- dimensionally toward a target 10. The magnetic scanning device 230 has the first scanning electromagnet 26 and the second scanning electromagnet 28, for example. The magnetic ion beam transporting device 240 has three quadruple-pole electromagnets 54, 56, 58 arranged coaxially, for example.