Title:
ION SENSOR
Document Type and Number:
Japanese Patent JP2948049
Kind Code:
B2
Abstract:
PURPOSE: To provide a wholly-solid type anion sensor having no internal liquid, but an extremely small size and long service life.
CONSTITUTION: The title full-solid type ion sensor is based on such an idea that any wholly-solid ion sensor can be realized when a differential circuit is constituted by fitting alkali-free glass films 9 and 9a having different properties to the gate films of two sensors ISFET (ion sensitive field effect transistor) 1 and 2. Since lead phosphate glass can have various ion selection ratios when, for example, the composition of the glass is changed, the alkali-free glass films having different compositions are fitted to the gate films of the two ISFETs 1 and 2 having the same dimension and same characteristics. When lead phosphate glass is used, a wholly-solid type ion sensor chip can be obtained by fitting lead phosphate glass films containing Ag2O in different wt.% to the gate films of the ISFETs 1 and 2 and arranging the ISFETs 1 and 2 and metallic electrodes on the same silicon chip.
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Inventors:
ITO YOSHITAKA
NOMURA TAKESHI
MASUI KANJI
NOMURA TAKESHI
MASUI KANJI
Application Number:
JP9547793A
Publication Date:
September 13, 1999
Filing Date:
March 30, 1993
Export Citation:
Assignee:
SHINDENGEN KOGYO KK
International Classes:
G01N27/414; G01N27/403; (IPC1-7): G01N27/414; G01N27/403
Domestic Patent References:
| JP56130648A | ||||
| JP5679245A |
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