PURPOSE: To stick firmly an ion sensitive film by supporting hydrophobic organic polymers to the surface of an inorganic solid made mainly of silicon, by organic polymer chain fixed in grafted state through a silane coupling agent residue.
CONSTITUTION: The heterogeneous film type ion sensitive film such as an FET gate film made of SiO2 system inorganic solid having Si3N4 layer and a pH ion sensitive glass film is stuck on the surface of SiO2 system inorganic solid of e.g. IS-FET. The silane coupling agent is coupled with the inorganic solid film surface, the mixture consisting of monomer of one or ≥2 kinds among materials capable of bonding with the silane coupling agent and condensing the polymerizing, ion sensitive material, hydrophobic organic polymer and plasticizer if necessary is painted thereon, and held under the polymerizing temp. of the monomer condensable and polymerizable to grow the polymer chain due to condensation and polymerization in grafted state, and the sticking is performed.
TAWARA OSAMU
MAEDA TAKUMI
