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Title:
ION SOURCE DEVICE
Document Type and Number:
Japanese Patent JPS6070699
Kind Code:
A
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JPH0817375ION SOURCE
Inventors:
ITOU YASUYUKI
SUGAWARA TOORU
Application Number:
JP17693483A
Publication Date:
April 22, 1985
Filing Date:
September 27, 1983
Export Citation:
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Assignee:
TOSHIBA KK
International Classes:
H01J37/08; G21K1/00; H01J3/04; H01J27/04; H05H7/08; (IPC1-7): G21K1/00; H01J3/04; H01J27/04; H01J37/08; H05H7/08
Attorney, Agent or Firm:
Noriyuki Noriyuki



 
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