Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
IONIZATION VACUUM GAUGE CONTROL DEVICE
Document Type and Number:
Japanese Patent JPH10213508
Kind Code:
A
Abstract:

To provide a technique capable of surely preventing filament disconnection.

When pressure is to be found on the basis of the magnitude of an ionic current I, by collecting ion formed by gas molecule ionization with a collector C after impressing positive voltage on the grid G of an ionization vacuum gauge 1 using an ionization vacuum gauge control device and producing thermion by heating a filament F, magnitude of a filament current If energizing through the filament F is directly detected by providing an overcurrent protection circuit 3 on the ionization vacuum gauge control device and the filament current If is limited so as not to exceed the specific upper value. It is possible to infallibly protect overcurrent because the filament current If can be limited without detecting an emission current Ie.


Inventors:
KAKU AKIRA
NAKAMURA SHIZUO
Application Number:
JP2719997A
Publication Date:
August 11, 1998
Filing Date:
January 27, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ULVAC CORP
International Classes:
G01L21/30; G01L21/32; (IPC1-7): G01L21/30
Attorney, Agent or Firm:
Shigeo Ishijima (1 outside)