Title:
高圧力動作用に設計された動作パラメータと形状とを有する電離真空計
Document Type and Number:
Japanese Patent JP5728728
Kind Code:
B2
Abstract:
An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
Inventors:
Brooker Gerald A.
Application Number:
JP2010547736A
Publication Date:
June 03, 2015
Filing Date:
February 19, 2009
Export Citation:
Assignee:
MKS INSTRUMENTS,INCORPORATED
International Classes:
G01L21/32
Domestic Patent References:
| JP2005534032A | ||||
| JP10281911A | ||||
| JP2004349102A | ||||
| JP7181095A | ||||
| JP10213509A | ||||
| JP2000241281A |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko
Masashi Noda
Kenro Tsutsumi
Kumiko Hayashida
Kenichi Nakata
Daisuke Kaneko