Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
IONIZATION VACUUM GAUGE
Document Type and Number:
Japanese Patent JPH1172406
Kind Code:
A
Abstract:

To enhance precision and stability by using a multiple ion collector in a small-sized ionization vacuum gauge.

An electronic source is disposed outside an anode volume of a releasing anode 14, and a plurality of ion collector electrodes 18, 18' are disposed in the anode volume, and a plurality of anode props 16, 16' extending to an axial direction for supporting the releasing anode are electrically connected to the releasing anode 14. In order to strongly repel electrons from the anode props 16, 16', the plurality of ion collector electrodes 18, 18' are disposed so as to sufficiently approach the plurality of anode props 16, 16' extending in an axial direction, respectively.


Inventors:
BILLS DANIEL GRANVILLE
Application Number:
JP4965998A
Publication Date:
March 16, 1999
Filing Date:
March 02, 1998
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
GRANVILLE PHILLIPS CO
International Classes:
G01L21/30; H01J41/02; H01J41/04; H01J41/10; H01J49/04; (IPC1-7): G01L21/30
Domestic Patent References:
JPS59207972A1984-11-26
Attorney, Agent or Firm:
Seiji Yanagida (1 person outside)



 
Previous Patent: MANUFACTURE OF ETHYLENE POLYMER

Next Patent: BALANCER