Title:
IONIZATION VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2008233079
Kind Code:
A
Abstract:
To provide ionization vacuum gauges or, in particular, an ionization vacuum gauge that utilizes carbon nanotubes.
An ionization vacuum gauge according to the present invention includes: a cathode including a substrate and an emitter film provided on the substrate; a gate electrode installed a predetermined distance away from the cathode; and an ion collector installed a predetermined distance away from the gate electrode. The emitter film of the cathode includes a carbon nanotube, low-melting glass particles, and conductive particles.
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| JPS5760241 | VACUUM MEASURING APPARATUS |
Inventors:
YANG YUAN-CHAO
TANG JIE
QIAN LI
CHIN HIKIN
LIU LIANG
FAN FENG-YAN
TANG JIE
QIAN LI
CHIN HIKIN
LIU LIANG
FAN FENG-YAN
Application Number:
JP2008063197A
Publication Date:
October 02, 2008
Filing Date:
March 12, 2008
Export Citation:
Assignee:
KOFUKIN SEIMITSU KOGYO
UNIV QINGHUA
UNIV QINGHUA
International Classes:
G01L21/34
Domestic Patent References:
| JP2006329880A | 2006-12-07 | |||
| JP2006343305A | 2006-12-21 | |||
| JPS5611332A | 1981-02-04 | |||
| JP2007033422A | 2007-02-08 | |||
| JP2007024849A | 2007-02-01 | |||
| JP2005062176A | 2005-03-10 | |||
| JPH07181095A | 1995-07-18 |
Foreign References:
| WO2006094687A1 | 2006-09-14 |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
Takashi Watanabe
Yasuhiko Murayama
Shinya Mitsuhiro
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