Title:
IONIZATION VACUUM GAUGE
Document Type and Number:
Japanese Patent JP3396726
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enhance measuring sensitivity and accuracy in a BA-type ionization vacuum gauge.
SOLUTION: In the BA-type ionization vacuum gauge 10, an ion collector electrode 16 in an open grid 12 is formed into a loop shape, and the loop surface thereof is arranged directed toward a filament 14. Electrons, discharged from the filament 14 fly so as to be focused inside the loop of the ion collector electrode 16 and collides with gas molecules herein to form ions. By causing electrons to fly to focus them into the loop of the ion collector electrode 16, ions can be formed in the vicinity of the ion collector electrode 16, and an electron moving path is extended.
Inventors:
Osamu Ariyada
Hiroaki Suzuki
Hiroaki Suzuki
Application Number:
JP2000224773A
Publication Date:
April 14, 2003
Filing Date:
July 26, 2000
Export Citation:
Assignee:
Arios Co., Ltd.
International Classes:
G01L21/30; H01J41/04; (IPC1-7): G01L21/30; H01J41/04
Domestic Patent References:
| JP1172406A |
Other References:
【文献】独国特許出願公開2457431(DE,A1)
Attorney, Agent or Firm:
Kihei Watanabe