IONIZATION VACUUM GAUGE

Japanese Patent JPH03135746

A

PURPOSE:To measure pressure in an ultra-high-vacuum area by generating ions at an ion generation part by the collision of an electron, emitted from the cathode of an electron gun part, against residual gap molecules during reciprocal motion, and gathering the ions. CONSTITUTION:An electric field production part 24 where doughnut-shaped electrodes 24a - 24f are arranged coaxially at specific intervals is formed behind the electron gun part 23 and the electrodes are applied with specific voltages respectively. The electron emitted from the heat cathode 21 is accelerated because of the potential difference between the cathode 21 and electrode 24a to flow nearby the axis of the hole of the electrodes and move toward the electrode 24d, but decelerated to stop. The stopping electrode is inverted to return to nearby the cathode 21 and stop, and this motion is repeated. While the electron reciprocates, the electron collides against the residual gas molecules to generate the ions with high probability. The generated ions while gathered by an ion gathering part (between the electrodes 24d and 24f) are accelerated toward an ion collector part 25 and gathered by the collector 25 eventually. Consequently, the coefficient value of the vacuum gauge becomes large and the value of a necessary electron current may be small.

KANEMOCHI TORU
KINOSHITA TOMOYUKI
URANO TOSHIO
HONGO SHOZO
NAKAMURA SHIZUO

JP27303389A

June 10, 1991

October 20, 1989

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ULVAC CORP

G01L21/30; (IPC1-7): G01L21/30

JPS495078A	1974-01-17
JP45001596A

Yasuo Iisaka

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