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Patent Searching and Data


Title:
IONIZATION VACUUM GAUGE
Document Type and Number:
Japanese Patent JPS6135325
Kind Code:
A
Abstract:

PURPOSE: To measure pressure without correcting the direction and intensity of a magnetic field by using a spherical electrode structure and gathering ions to a collector without reference to whether a magnetic field is present or not and its intensity.

CONSTITUTION: The same effect is obtained in any direction of the magnetic field by making the electrode spherical, and an equal ion current is supplied in the presence of the magnetic field having the same intensity. Further, even if the radius of rotation when ions are in spiral motion about the direction of the magnetic field as a ceonter axis varies, ions produced between a lead-out electrode 6 and the collector 7 are all gathered to the collector 7 with a magnetic field produced between two electrodes (6 and 7). Thus, the constant ion current is supplied under the same pressure regardless of the intensity of the magnetic field and its direction. Thus, a pressure measurement is taken without any correction.


Inventors:
OGIWARA TOKUO
Application Number:
JP15539184A
Publication Date:
February 19, 1986
Filing Date:
July 27, 1984
Export Citation:
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Assignee:
JAPAN ATOMIC ENERGY RES INST
International Classes:
G01L21/32; (IPC1-7): G01L21/32
Attorney, Agent or Firm:
Nao Kuwahara