Title:
IONIZATION VACUUM METER
Document Type and Number:
Japanese Patent JP3086011
Kind Code:
B2
Abstract:
PURPOSE: To enable a true pressure to be measured and obtain an ionization vacuum meter which is also suited for measurement of pressure at an extremely high vacuum region.
CONSTITUTION: A title item is provided with an electron source 1, an electron lead-out electrode 2, an ion-collection electrode 3, an electron-convergence electrode 4, and an electron-collection electrode 5. Also, it is provided with a means for turning an electron current for ionizing a gas molecule into pulses, a means for measuring time change of current which flows at the ion-collection electrode, and a means for adjusting a potential of the electron-collection electrode.
Inventors:
Norio Ogihara
Application Number:
JP17283891A
Publication Date:
September 11, 2000
Filing Date:
July 12, 1991
Export Citation:
Assignee:
Japan Atomic Energy Research Institute
International Classes:
G01L21/30; (IPC1-7): G01L21/30
Domestic Patent References:
| JP5113434B1 |
Attorney, Agent or Firm:
Toshio Nishizawa