IRIDIUM OXIDE NANOTUBE AND METHOD OF FORMING THE SAME

Title:

IRIDIUM OXIDE NANOTUBE AND METHOD OF FORMING THE SAME

Document Type and Number:

Japanese Patent JP2006117520

Kind Code:

A

Abstract:

To provide a method of forming an iridium oxide (IrOx) nanotube without using a template.

The method comprises: providing a substrate; introducing a (methyl cyclopentadienyl)(1,5-cyclooctadiene) iridium (1) precursor; introducing oxygen as a precursor reaction gas; establishing final pressure in the range of 1 Torr to 50 Torr; and growing the IrOx hollow nanotube from the surface of the substrate with the use of metalorganic chemical vapor deposition method (MOCVD). Representatively, the (methyl cyclopentadienyl)(1,5-cyclooctadiene)iridium (1) precursor is initially heated to a 1st temperature within the range of 60°C to 90°C in an ampule and kept at the 1st temperature in a transporting line for introducing the precursor. The precursor can be mixed with an inert carrier gas such as Ar or oxygen which is the precursor reaction gas can be used as the carrier gas.

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Inventors:

ZHANG FENGYAN
BARROWCLIFF ROBERT A
GREGORY M STECKER
HSU SHENG TENG

Application Number:

JP2005300934A

Publication Date:

May 11, 2006

Filing Date:

October 14, 2005

Export Citation:

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Assignee:

SHARP KK

International Classes:

C01G55/00; B82B1/00; B82B3/00; H01L21/28; H01L21/285; H01L21/3205; H01L23/52

Attorney, Agent or Firm:

Hidesaku Yamamoto
Takaaki Yasumura
Takeshi Oshio

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