PURPOSE: To obtain a magnetic alloy thin film having big magnetic flux and high initial permeability in high-frequency region by forming said film out of alloy of iron and transition metal or Sn which shows a body-centered cubic structure single phase when quantity of elements of metal except iron becomes over quantity for solid solution in an equilibrium diagram and consists of uniaxial magnetic anisotropic film.
CONSTITUTION: A glass base 122 having steps is arranged in a chamber 121 and a target 123 is arranged opposite to the glass base 122 and a shutter 124 is placed between the base 122 and the target 123. On surfaces of two sides of the galss base 122, a permanent magnet 125 for applying a magnetic field in one direction in process of depositing a magnetic film and a heater 126 is provided at the back of the glass base and heating temperature for the glass base 122 is controlled by a thermoelectric couple 128. RF sputtering system above described is used to form iron base magnetic alloy thin film of uniaxially anisotropic, in which metallic particles obtained by combining more than one kind of transition metals and Sn so as to become over the quantity for solid solution in equilibrium diagram is compulsorily dissolved into solid solution with being applied outer magnetic field by the permanent magnet 125.
| JPH07102346 | HIGH HARDNESS STAINLESS STEEL EXCELLENT IN COLD WORKABILITY |
| WO/2015/190574 | BUILDUP WELDED BODY |
YOSHINARI TSUNEO
NARUSHIGE SHINJI
SANO MASAAKI
KUMAGAI AKIRA
SATOU MITSUO
