To prevent toxic ingredients such as decontamination gas ingredients from exerting bad influences on an object 28 to be processed in an isolator 1, and to prevent toxic substances generated from an object 128 to be processed from leaking to the outside from a hazard isolator 101.
An isolator 1 and a hazard isolator 101 store a bag-shaped or box-shaped sheet members 24 and 124. When objects 28 and 128 to be processed which are processed in the isolator 1 and the hazard isolator 101 avert decontamination gas ingredients, or include toxic substances, work is carried out while the objects 28 and 128 to be processed are covered by the bag-shaped or the box-shaped sheet members 24 and 124. As the decontamination gas ingredients or the toxic substances are adsorbed by the sheet members 24 and 124, the object 28 to be processed does not receive bad influences, and the toxic substances generated from the object 128 to be processed are prevented from leaking to the outside.
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| GB1109365B |
Takashi Matsuura
Hiroki Ogura
Takuya Fuji