To provide an isolator which can cleanly maintain the environment of the inside of a first working chamber, a working chamber, and prevent materials from outflowing from the ambient environment and has an airtightness, which can prevent the materials from discharging from the inside of the first chamber to the atmosphere, and in addition which possesses the function of detecting and informing whether the airtightness of the first or the like is damaged or not.
The isolator is provide with the first chamber surrounded by a first partition wall and a second chamber surrounded by the first partition wall and a second partition wall, and an information part informing an operator of change of a second pressure or the change of a first pressure in a state of generating the pressure difference between the first pressure, the pressure of a gas inside the first chamber, and the second pressure, the pressure of a gas inside the second chamber.
| WO/2017/126310 | CLEAN AIR DEVICE |
IWAMA AKIFUMI
YOKOI YASUHIKO
| JPH09503704A | 1997-04-15 | |||
| JPH01262947A | 1989-10-19 | |||
| JP2005296889A | 2005-10-27 |