Title:
極紫外光源のためのビーム搬送システム
Document Type and Number:
Japanese Patent JP5890543
Kind Code:
B2
Abstract:
An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target location; an extreme ultraviolet light vacuum chamber defining an interior vacuum space that houses an extreme ultraviolet light collector and the target location; and a beam delivery system that is configured to receive the amplified light beam emitted from the drive laser system and to direct the amplified light beam toward the target location. The beam delivery system includes a beam expansion system that expands a size of the amplified light beam and a focusing element that is configured and arranged to focus the amplified light beam at the target location.
Inventors:
Bergstedt Robert N
Partro William N
Formen Coff Igo Vie
Kim Nam-Hyun
Partro William N
Formen Coff Igo Vie
Kim Nam-Hyun
Application Number:
JP2015028912A
Publication Date:
March 22, 2016
Filing Date:
February 17, 2015
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H05G2/00
Domestic Patent References:
| JP2008532232A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki