PURPOSE: To effectively suppress abnormal discharge phenomenon by sintering a pulverized and press molded raw material containing In oxide and Sn oxide to become a specific relative density under oxidizing atmosphere after impact compression processing.
CONSTITUTION: ≥20% of a raw material powder mixture obtained by mixing In2O3 and SnO2 powder is put into a cylindrical container and is pulverized to obtain a powdery material after impact compression processing of 500-10GPa with detonation shock wave by explosive or shock wave by collision of a high speed flying body. Next, after the powdery material is mixed again with the residual raw material powder to obtain a processed powder, which is press molded with ≥1ton/cm2 to obtain a molded body. Furthermore the molded body is sintered under O2 atmosphere at 1350-1450°C to form the ITO sintered body containing In, Sn and O2 and ≥80% in relative density, ≤10μm in Sn aggregation diameter, ≤10μm in average crystalline diameter.
OKADA MITSUO
MATSUI SHIGERU
AKASHI TAMOTSU
SUMITOMO COAL MINING