Title:
JIG FOR ADJUSTMENT, ADJUSTMENT METHOD, AND POSITION DEVIATION MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2020136622
Kind Code:
A
Abstract:
To perform a positioning of a ring member with high accuracy.SOLUTION: A jig for adjustment is for adjusting a position of a ring member mounted on a mounting stage, and comprises: a moving member which is provided to an outer peripherally of the mounting stage and can be moved along each of a first axis and a second axis which cross each other in a flat surface crossing a center axis of the mounting stage; a plurality of fixing tools for fixing the ring member to the moving member; and an adjustment mechanism which is provided to the moving member, and adjusts the position of the center axis of the ring member to the position of the center axis of the mounting stage by moving the moving member to which the ring member is fixed via the plurality of fixing tools along each of the first axis and the second axis.SELECTED DRAWING: Figure 3
Inventors:
OGATA ATSUSHI
SASAKI NOBUMINE
SASAKI NOBUMINE
Application Number:
JP2019032241A
Publication Date:
August 31, 2020
Filing Date:
February 26, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/3065; H01L21/683
Attorney, Agent or Firm:
Sakai International Patent Office