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Title:
JIG FOR BURNING ALUMINUM NITRIDE
Document Type and Number:
Japanese Patent JP2011236102
Kind Code:
A
Abstract:

To provide a novel jig that prevents adhesion to a material to be burned and reduces the contamination of the material to be burned, as the jig used for burning a metallized aluminum nitride substrate having a wiring pattern made of tungsten and an insulating pattern made of aluminum nitride in a part on the wiring pattern.

This jig comes into contact with the material to be burned in a process of burning the metallized aluminum nitride substrate having the wiring pattern made of tungsten and the insulating pattern made of aluminum nitride in a part on the wiring pattern. The burning is performed using the jig where at least the surface coming into contact with the material to be burned is composed of a composite surface of aluminum nitride and tungsten in which aluminum nitride is made to exist at an area percentage of 15-35%.


Inventors:
MATSUMURA YASUNORI
Application Number:
JP2010111050A
Publication Date:
November 24, 2011
Filing Date:
May 13, 2010
Export Citation:
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Assignee:
TOKUYAMA CORP
International Classes:
C04B35/64; C22C32/00; B22F7/04; C22C1/05
Domestic Patent References:
JPH03275567A1991-12-06
JPH05170551A1993-07-09
JPH03275567A1991-12-06