PURPOSE: To obtain a joined body of an insulator free of mobile ion and a conductor without using an adhesive by anodically joining the insulator and conductor through a conductive film and an insulator layer contg. mobile ion.
CONSTITUTION: A joined body is shown in the figure. An insulator 1 free of mobile ion such as PZT and barium titanate and a conductor 10 such as an Si substrate are joined through a conductive film 3 such as a thin aluminum film and an insulator layer 5 such as glass contg. mobile ion. In this case, the thickness of the insulator layer 5 is controlled to ≤0.5mm, the roughness of the joining surface of the insulator 1 is adjusted to ≤500, and spatial part formed by the recess of the joining surface is controlled to ≤30% of the joining surface. The conductive film 3 is formed on the adhesive surface of the substrate 1, the insulator layer 5 is anodically joined to the conductor 5 with photoirradiation, and finally the conductive film 3 and the insulator layer 5 are anodically joined with photoirradiation to produce the joined body.
TAMURA MIKI
FUSHIMI MASAHIRO
YAGI TAKAYUKI
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