Title:
接合ツール検査装置
Document Type and Number:
Japanese Patent JP6402026
Kind Code:
B2
Inventors:
Toshimasa Yamane
Yoshiaki Yamane
Yoshiaki Yamane
Application Number:
JP2014258792A
Publication Date:
October 10, 2018
Filing Date:
December 22, 2014
Export Citation:
Assignee:
Key Rex Co., Ltd.
International Classes:
G01N21/88; B23K20/12; B23K20/26
Domestic Patent References:
| JP2014128824A | ||||
| JP2013230506A | ||||
| JP2009160656A | ||||
| JP2008292443A |
Attorney, Agent or Firm:
Maeda patent office