Title:
JOINT ARM DEVICE FOR MOVING BODY
Document Type and Number:
Japanese Patent JPS6357190
Kind Code:
A
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Inventors:
IWATA YOSHIKI
Application Number:
JP20181586A
Publication Date:
March 11, 1988
Filing Date:
August 29, 1986
Export Citation:
Assignee:
CANON KK
CANON HANBAI KK
CANON HANBAI KK
International Classes:
B25J9/00; B25J18/02; H01L21/677; H01L21/68; (IPC1-7): B25J9/00; B25J18/02; H01L21/68
Attorney, Agent or Firm:
Tatsuo Ito